Spectroradiometric Detector Measurements UV Visible Near Infrared

1 Page 1 NAT'LINSTOFSTAND&TECH A111D70S12ED PU8UCATI0N8 NISTSpecialPublication250-41(2008) Spectroradiometric Detector Measurements: Ultraviolet,Visible,andNear-Infrared DetectorsforSpectralPower ThomasC.Larason JeanneM.Houston I... Open at page → 3 Page 3 NISTSpecialPublication250-41(2008) Spectroradiometric Detector Measurements: Ultraviolet,Visible,andNear-Infrared DetectorsforSpectralPower ThomasC.Larason JeanneM.Houston OpticalTechnologyDivision PhysicsLaboratory Nati... Open at page → 4 Page 4 Certaincommercialentities,equipment,ormaterialsmaybeidentifiedinthis documentinordertodescribeanexperimentalprocedureorconceptadequately.Such identification isnotintendedtoimplyrecommendation orendorsementbythe NationalI... Open at page → 5 Page 5 Preface Thecalibrationandrelatedmeasurement servicesoftheNationalInstituteofStandardsand Technology(NIST)areintended toassistthemakersandusersofprecisionmeasuring instrumentsinachievingthehighestpossiblelevelsofaccuracy,... Open at page → 6 Page 6 AbstractandKeyWords TheNationalInstituteofStandardsandTechnologysuppliescalibratedphotodiodestandards andspecialtestsofphotodetectors forspectralradiantpowerresponsivity forthewavelengths from200nmto1800nm.Thescaleofspec... Open at page → 7 Page 7 TableofContents 1.INTRODUCTION 1 2.NISTSPECTRORADIOMETRICDETECTORMEASUREMENTSERVICE 4 2.1 DescriptionofMeasurementServices 4 2.2 MeasurementLimitations 7 2.3HowtoOrderCalibrations 8 2.4 TechnicalContacts 9 3.MEASUREMENTT... Open at page → 8 Page 8 5.4.1CalibrationoftheVisibleSiWorkingStandards(VisWS) 36 5.4.2 CalibrationoftheUltravioletWorkingStandards(UVWS) 37 5.4.3 CalibrationoftheNear-IRInGaAsWorkingStandards(IGAWS) 38 6.CALIBRATIONPROCEDURESANDCOMPUTERAUTOMATI... Open at page → 9 Page 9 9.CHARACTERISTICSOFPHOTODIODESAVAILABLEFROMNIST 85 9.1 HamamatsuS1337-1010BQ 85 9.2 HamamatsuS2281 87 9.3 OSIOptoelectronicUV-100 87 9.4 DetectorMountingFixtureMechanicalDrawings 89 10.FUTUREWORK 91 11.ACKNOWLEDGMENTS 92... Open at page → 10 Page 10 LISTOFFIGURES Figure2.1.Theexpandeduncertainties(k= 2)forspectralpowerresponsivitymeasurements.... 5 Figure3.1.Thegeometryfordetectorspectralpowerresponsivitymeasurements 11 Figure3.2.Blockdiagramofphotodetectorsubstitut... Open at page → 11 Page 11 Figure7.10.Examplecustomerphotometeruncertainty 77 Figure8.1.ControlchartexampleforaNISTVisibleWorkingStandard(VisWS) 80 Figure8.2.NISTdifferencefromKCRVinCCPRK2.b(Visible)KeyComparison 81 Figure8.3.ChangeintheUVspectral... Open at page → 13 Page 13 1. Introduction Thisdocument describes theNational InstituteofStandardsandTechnology (NIST) MeasurementServiceforspectralradiantpowerresponsivityintheultraviolet(UV),visible,and near-infrared(NIR)spectralregions(200nmto1... Open at page → 14 Page 14 asthedetectorscalebase.Relativeuncertaintieswerereportedontheorderof1%to3%'over thespectralrangefrom390nmto1100nm[6]. Note: Thisdocumentconforms, totheISOGuidetotheExpressionof Uncertainty inMeasurement [7],andfollowsthe... Open at page → 15 Page 15 WattRadiometer(POWR), istheU.S.primarystandardforopticalpower[23].Thespectral responsivityscale[24]istransferredbyvariousdetectors,includingsecondgenerationsilicon photodiodetrapdetectors,toworkingstandardsusedwiththeNIS... Open at page → 16 Page 16 2. NISTSpectroradiometric DetectorMeasurementService ThissectiondescribesthephotodetectorcaHbrationsandmeasurements offeredbytheOptical TechnologyDivision.AcompletelistingofthecalibrationservicesofferedbyNISTcanbe foundi... Open at page → 17 Page 17 Table2.2.NISTspectralpowerresponsivityrelativeexpandedik = 2) uncertaintiesfortypicalUV,visible,andNIRphotodiodes. Wavelength R-Clativccxpa-iidcdunccrttiinly (A' — 21r%i ^JX'"} rnml IJV Vi'iihU-'-^V V1riIU1^ NIR 200 38 2... Open at page → 18 Page 18 DescriptionsofeachServiceIDnumberareprovidedbelow. 3907IC-UVSiliconPhotodiodes NISTwillsupplycustomerswithanOSIOptoelectronics'*modelUV-100windowedsilicon photodiodecharacterized intheultraviolet(UV)spectralregion.TheUVs... Open at page → 19 Page 19 ofthephotodiodes isunderfilledforthemeasurementswithabeamofdiameter~1mm.The spectralpowerresponsivity ismeasuredatradiantpowerlevelsoflessthan 1|iW.Therelative expandeduncertaintyrangesfrom0.2%to4%,dependingonthewaveleng... Open at page → 20 Page 20 HowtoOrderCalibrations 1)ReferencetheServiceIDnumber(s)onthepurchaseorder. DetailsofServiceIDnumbers39075S,39080S,and3908ISshouldbediscussedwithoneof thetechnicalcontactshstedinSec.2.4priortosubmittingaformalrequest. 2)P... Open at page → 21 Page 21 2.4 TechnicalContacts Fortechnicalinformationorquestionscontact: JeanneHouston (301)975-2327 email:ieanne.houston(a-;nist.^ov ThomasLarason (301)975-2334 email:thomas.lara$on((6:nist.gov orfax (301)869-5700 Technicalinfo... Open at page → 22 Page 22 3. MeasurementTheory Thissectiondescribesthetheoryandthemathematicalbasisforthemeasurementmethodsused fortheservicesoutlinedinthispubhcation.Themeasurementequation ispresentedandthe generalizingassumptionsarediscussed.Th... Open at page → 23 Page 23 Theareaintegralofirradiancegivesthespectralradiantpowerfunctionofthecomparator systematthedetector: ^D,x(^'^)=lE,{x,y,AoaydA=T(Ay0,(A„A), (3.4) A where0^(1^,A)istheoutputpowerfromthemonochromatorandt{A)isthetransmittance... Open at page → 24 Page 24 Eq.(7.12)[29].BoththesHt-scatteringfunctionz{Aq-A)andthefactor canbedetermined experimentally, althoughthelatterrequiresdeconvolution fromthemeasuredoutputflux (power)ofthemonochromator. TheoutputsignalVcannowbeexpressed... Open at page → 25 Page 25 A/i (3.11) UsingEq.(3.11),themeasurementequation(Eq.(3.9))cannowbewritteninaformthatis easilyappliedtothesituationofmeasuringdetectorspectralresponsivity: V(AA,A,)=sM-tM-0'M. (3.12) Beforeextending thegeneralizedmeasurem... Open at page → 26 Page 26 Diffractioneffectscanbeestimatedfromtherelationship[31,32]: d'=2A4--, (3.13) d where6^(inradian)isthediffractionangle(forthefirstAirydisk),Xisthelongestwavelength ofthesystem,anddisthediameteroftheapertureatthemonochroma... Open at page → 27 Page 27 theUV)thatcanhavestrongspectralvariationsinoutputintensity.Typically,thevariationsare smallandaretreatedasuncertaintyterms. Stray-light islightfromoutsidethemonochromatorbandpassAithatisscatteredintothebeam. Theamountofs... Open at page → 28 Page 28 IftheinputXtoeachsystemisassumedtobeconstant(thisisthebasisofthesubstitution method),solvingforthedetectorresponsivities Sxgives: (3.18) Thus,usingthesubstitutionmethod,thestandarddetectorresponsivity 5sisscaledbytherati... Open at page → 29 Page 29 3.2.3SubstitutionMethodwithMonitor Measurement errorsduetosourcepowerfluctuations areminimizedbyintroducing a beamsplitterandmonitordetectorintothemeasurement setup. Figure3.3illustrates the photodetectorsubstitutionmeth... Open at page → 30 Page 30 Thisisthe"routine"measurementequationforthesubstitutionmethoddepictedinFig.3.2.The measurement equationforthe"substitutionmethodwithmonitor" (Fig.3.3)iswrittenby expHcitlyincludingthetransmittance ibsandreflectance /?bso... Open at page → 31 Page 31 VG mx _ s (3.27) Thisistheworkingformofthemeasurementequation.Notethatitstillhasthegeneralform: (3.18) Dependingonhowthemonochromatorwavelengthscaleiscalibrated,acorrectiontermmaybe neededwhentheresponsivitycurvesofthete... Open at page → 32 Page 32 4. EquipmentDescription InthissectionthecomponentsandassociatedelectronicsoftheVisibletoNear-InfraredSpectral ComparatorFacility(Vis/NIRSCF)andUltravioletSpectralComparatorFacility(UVSCF)are described. 4.1 VisibletoNear-... Open at page → 33 Page 33 4.1.1Vis/NIRSourceandInputOptics TypicallytheVis/NIRSCFusesa100W(12V)quartz-halogenlampthatisconstant-current controlledforstability.Thelampisusedoverthespectralrangeof350nmto1800nm.An integratingspherewithaspectral-line... Open at page → 34 Page 34 4.1.2Vis/NIRMonochromator ThevisiblecomparatorusesamodifiedAppliedPhysicsCorporationCary-14prism-grating monochromator. TheCary-14employsa30°fusedsilicaprisminserieswitha600linesper millimeterechelettegrating.Themonochro... Open at page → 35 Page 35 Typically,twoworkingstandardsareusedforeachspectralcomparisonmeasurement. The secondworkingstandardcanbeusedasa"check"standardtoverifythatthemeasurement processisoperatingnormally,oris"incontrol." 4.1.6BeamSplitterandMon... Open at page → 36 Page 36 LightTightEnclosure UVWS Detector Carousel BeamSplitter Monitor Detector Order Sorting Fnterji tJ Shutter QJU >Q DoubleGrating Monochromator Sources Figure4.3.UltravioletSpectralComparatorFacility(UVSCF). UVenhancedsilic... Open at page → 37 Page 37 Safetyconsiderations UVfilteringsafetyglassesarewornwhenevertheargonmini-arcsourceislit.Evenwithsafety glasseson,theargonmini-arc isnevervieweddirectly.TheHeNealignmentlasersareLaser SafetyClassII.Shieldsmountedontheside... Open at page → 38 Page 38 layerdiodewithenhancedresistancetoUVradiationdamage.Typicallytwoworkingstandards areusedforeachspectralcomparisonmeasurement.Thesecondworkingstandardcanbeused asa"check"standardtoverifythatthemeasurementprocess isoperati... Open at page → 39 Page 39 TestReports Computer InstrumentControl andDataStroage Computer DataAnalysis Computer TE Temperature Controller DVMwith Multiplexer Input DVM DVM Other Instruments It i . ! 1 MonitorTE Temperature Controller :><j-:-l Moni... Open at page → 40 Page 40 TheSCFsaretypicallyoperatedasdescribedabove(DCmode),butwiththeadditionofa chopperintheopticalbeam,ACmeasurementsarepossibleforspecialtests.ACmeasurements arenotdiscussedinthispublication;seeRef.[39]foradetaileddiscussion... Open at page → 41 Page 41 5. SpectralPowerResponsivityScaleRealization ThissectiondescribesthedeterminationoftheNISTspectralpowerresponsivityscaleandits traceabilitytoaprimarystandard.Thepropagationofthescale,theoperationofacryogenic radiometer,a... Open at page → 42 Page 42 ThePOWRandL-1ACRaredescribedinSec.5.2.Transferstandards(TS)aredetectors designedtotransferthespectralradiantpowerresponsivityscalefromthecryogenicradiometer toworkingstandard(WS)detectorsattheSCF.Transferstandardsmustmea... Open at page → 43 Page 43 intercomparisonbetweenPOWRandtheL-1ACRshowedthatthesetwostandardsagreedto within0.02%,whichiswithintheircombineduncertaintiesasshowninFigure5.4[23]. Figure5.2.TheconstructionoftheNISTPrimaryOpticalWattRadiometer (POWR).... Open at page → 44 Page 44 4 <> O488nm 514nm O633nm L-1 POWR Figure5.4.ComparisonofPOWRandtheL-1ACRmeasurementsshowingthe agreementbetweentheACRs.Theerrorbarsarethemeasurementuncertainty. 5.3 CalibrationofTransferStandardswithaCryogenicRadiometer... Open at page → 45 Page 45 Apracticalmeansofdisseminating theopticalpowerscaletocustomers istofirsttransferthe scalefromacryogenicradiometerinSIRCUStoworkingstandarddetectorsusedintheUVand Vis/NIRSCFs.Thistransferofscalerequirestheuseofadetectorth... Open at page → 46 Page 46 downstreamonthebeampathcontrolsthelaserbeamintensitytobetterthan0.01%overthe durationofthemeasurement.Thelaserbeamisthensentthroughthecombinationofapinhole tocreateanAirydiffractionpattern,avariableaperturetoreducethesca... Open at page → 47 Page 47 Twosilicontrapdetectors(VisTrap),twogermaniumphotodiodetransferstandards(GeTS) thatweretemperature-controlled at-30°C,twoindiumgalliumarsenidephotodiodetransfer standards(IGATS),temperature-controlled to25°,severalUVtran... Open at page → 48 Page 48 betweenTScomponentsofvariance[50].Thatis,theweightingincludesboththestatistical uncertaintyofthecomparisonwithaTSbutalsothevariationbetweeneachTStoaccountfor suchthingsasdriftduringthemeasurementor(long-term) driftbetwee... Open at page → 49 Page 49 5.4.2CalibrationoftheUltravioletWorkingStandards(UVWS) TwoUVworkingstandards(UVWS)werecalibratedfrom200nmto400nmbyaseriesof measurements attheUVSCF,Vis/NIRSCF,SIRCUS,andSURFwithvariousSiphotodiode UVtransferstandardsandt... Open at page → 50 Page 50 5.4.3CalibrationoftheNear-IRInGaAsWorkingStandards(IGAWS) TheIGAworkingstandards(IGAWS)responsivitiesaredeterminedontheVis/NIRSCFusing theVisWSoverthespectralregionfrom700nmto950nmandtheIGATSfrom955nmto 1650nm.TheIGATSwe... Open at page → 51 Page 51 from700nmto920nmandapyroelectricdetectorfrom925nmto1800nm.Thiscalibration occurredbeforethePOWRcryogenicradiometerwasoperational. Thepreviousprimary cryogenicradiometer,HACR,wasusedtocalibratetheVisTrap.Therelativerespon... Open at page → 52 Page 52 6. CalibrationProceduresandComputerAutomation 6.1 SpectralRadiantPowerResponsivity Thissectiondescribesthespectralradiantpowerresponsivitymeasurementproceduresforboth theUVSCFandVis/NIRSCF.ThesecorrespondtoServiceIDnumbe... Open at page → 53 Page 53 workingstandard)andmonitordetectorratiosislessthaneitherindividualsignalstandard deviation.Thisistheresultofsimultaneouslysamplingboththetest(orworkingstandard)and monitordetectorinabeamwithsmallfluctuations inpowerlevel... Open at page → 54 Page 54 T— I— I — I— I— I— 1 — I— I— I— I — I— I— I— I — I— I— I— I — I— I— I— I — I— I— I— I — \— I— I— r 200 400 600 800 1000 1200 1400 1600 1800 Wavelength[nm] Figure6.2.SpectralresponsivitiesoftypicalSi,InGaAs,andGephotodiod... Open at page → 55 Page 55 6.2 SpatialUniformity ThissectiondescribestheproceduresusedinNISTServiceIDnumbers3907IC,39073C, 39077C,and3908IStodeterminetheresponsivityspatialuniformityofdetectors.Thespatial uniformitymeasurementproceduresarethesamef... Open at page → 56 Page 56 semiconductor isalmosttransparentnearthebandgap,changesinthespatialreflectivityofthe bondingmaterialaffecttheamountoflightreflectedandthereforetheresponsivityofthe photodiode. Since1993,theuniformityoftheS1337-1010BQandt... Open at page → 57 Page 57 X[mm] (a)HamamatsuSI337at500nm. X[mm] (b)HamamatsuSI337at1000nm. X[mm] (c)HamamatsuS2281at500nm. X[mm] (d)HamamatsuS2281at1000nm. Figure6.4. Spatialuniformities oftypicalHamamatsu SI337andS2281 photodiodes.Theresponsivit... Open at page → 58 Page 58 X[mm] (a)OSIOptoelectronicsUV-100at350nm. X[mm] (b)EG&GJudsonTEGeat1000nm. ^-L"^J X[mm] (c)EG&GJudsonTEGeat1500nm. (d)EG&GJudsonTEGeat1600 Figure6.5. SpatialuniformitiesoftypicalOSIOptoelectronicsUV-100and EG&GJudsonGeph... Open at page → 59 Page 59 6.3ComputerAutomation ThissectiondescribesthecomputerautomationoftheUVandVis/NIRcomparator facihties. Theautomatedequipmentandcomputersoftwareusedfortypicalmeasurements arebriefly described.Theoperationofthespectralcompa... Open at page → 60 Page 60 i TestReports Computer InstrumentControl andDataStrqage Computer CQ 00 oo I W W W DataAnalysis andFileBackup Computer TE Temperature Controller InGaAs WorkingStandards DVM T Amplifiers j Multiplexer DVM WorkingStandard &... Open at page → 61 Page 61 6.3.2ComputerCalibrationPrograms SCFSetupProgram Thisprogramperformsthreefunctions:initiahzetheSCFinstruments,ahgnthetestandworking standard(WS)detectors,andverifythesignallevelsfromthedetectorsbeforestarting measurement... Open at page → 62 Page 62 theresponsivityforatestdetectorbyusingEq.(3.27)foreachspectralscancombinationoftest detectorandworkingstandard.Then,ifmorethanonespectralscanwastaken,aweightedmean iscalculated.Wheretheweightingconstantsaretheinverseofac... Open at page → 63 Page 63 7. UncertaintyEvaluation Theuncertainty evaluation forthedetectorspectralpowerresponsivitymeasurements is explained inthissection. Firsttheuncertainty isevaluatedforthemeasurement equation developed inSec.3. Inaddition t... Open at page → 64 Page 64 (7.4) wherekischosenonthebasisofthelevelofconfidencedesired.Replacingudy)withthe relativecombinedstandarduncertainty Mc,rei(y)givestherelativeexpandeduncertaintyUrd=U/y. Thecoveragefactork=2isusedinthisdocumentfollowingt... Open at page → 65 Page 65 ameasurement, thenaweightedmean,iscalculated.Wheretheweightingconstantsarethe inverseofacombinationofthewithinscanandbetweenscancomponentsofvariance.The uncertaintyfortheweightedaverageisalsocalculatedastheinverseofthesq... Open at page → 66 Page 66 7.2.1WavelengthUncertaintyoftheMonochromator ThewavelengthscaleofbothSCFmonochromators iscalibratedannuallybyusingseverallaser andspectral-linedischargelamplines,andacorrectioncurveisfitted.Thereareresidualerrors (typica... Open at page → 67 Page 67 interval,andtheb(X)function(normallyatriangularfunction) isalsocalculatedat Inmintervals andnormalizedsothatthesumofallb(?i)valuesisequalto1,thenasum-productcalculation is performedasgiveninEq.(7.10).Theerrorduetotheband... Open at page → 68 Page 68 7.2.3AmbientTemperature Theresponsivitytemperature coefficient istypicallysmallformostdetectors,butcanbe significantdependingonthetypeofdetectorandwavelengthregion,especiallyforwavelengths nearthebandgapofasemiconductor... Open at page → 69 Page 69 7.2.5MeasurementReproducibility There isalsoastatisticaluncertaintyterm(TypeA)reflectingthereproducibility ofthe measurements (e.g.,settingupthemeasurementagainthenextday).Theuncertaintydueto reproducibilityincludesday-t... Open at page → 70 Page 70 Similarly,fromEq.(3.10),thestray-lightsignalKsl(^)ofthedetectorisgivenby: (7.16) Thespectralintegration isdoneovertheentireregionwherethespectralresponsivity isnotzero (totheextentthedataisavailable).Therelativeerrorduet... Open at page → 71 Page 71 occasionally, testdetectorshavingadifferentsizeofthesensitiveareaaremeasured, inwhich case,theerrorduetothescattered lightisconsidered. Asmentioned inSec.3.2.4,the backgroundsignalvoltagefromthedetectoramplifierhasbeenme... Open at page → 72 Page 72 Table7.2.Visibleworkingstandarduncertainty(transferfromVisTrapandGeTS) Uncertaintyconlributionfromeachcomponentofuncertainty[%] Wavelength TransferStd calibration VisWS-to- monitor rationoise Trati^fpr 1.1ullol^^l Std-to... Open at page → 73 Page 73 VisWS(HaraaraatsuS1337-1010BQ)UncertaintyComponents VisWS(HamamatsuS1337-1010BQ) RelativeCombinedUncertainty 3.0 -| 2.5 - — 2.0 - 1.5 - 0.0 -I , , ; , 1 1 : , ^ 1 , , , , 350 400 450 500 550 600 650 700 750 800 850 900 9... Open at page → 74 Page 74 Table7.3.Near-InfraredInGaAsworkingstandarduncertainty(transferfromVisWS, IGATS,andpyroelectricdetector) Uncertaintycontributionfromeachcomponentofuncertainty[%] Wavelength 1ransterStcl calibration IGAWS-to- monitor rati... Open at page → 75 Page 75 IGAWS(GPDGAP5000)UncertaintyComponents 0.0 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 Wavelength[nm] •TransferStdcalibration "IGAWS-to-moniior rationoise ATransferStd-to-monilor rationoise yIGAWS&TransferSi... Open at page → 76 Page 76 Table7.4.UVworkingstandarduncertainty(transferfromUVTSandVisTrap) Uncertaintycontributionfromeachcomponentofuncertainty[%] UV-100WS Wavelength TransferStd calibration UV-100 WS-to- monitor rationoise Std-to- monitor rati... Open at page → 77 Page 77 7.4 TransferfromWorkingStandardstoCustomerDetectors Thissection detailstheuncertaintycomponentswhentransferring thespectralpower responsivityscalefromtheworkingstandardstocustomerdetectors.Thetablesandfiguresare calculat... Open at page → 78 Page 78 Table7.5Relativecombinedstandarduncertainties forNISTspectralpower responsivityworkingstandardsfortheUV,visible,andNIRspectralregions. Wavelength Relativecombinedstandarduncertainty[%] [nm] UV(UVWS) Visible(VisWS)NIR(IGA... Open at page → 79 Page 79 7.4.1UVSiliconCustomerDetectorExampleUncertainty Table7.6liststheexampleuncertaintycomponents forthecalibrationofacustomer'sUV siliconphotodiodeusingtheUVWS.TheUVWScalibrationuncertainty istherelative combinedstandardunc... Open at page → 80 Page 80 ExampleCustomerUVSiPhotodiode(OSIUV-100)UncertaintyComponents _ 3.0 - (a) ExampleCustomerUVSiPhotodiode(OSIUV-100)RelativeExpandedUncertainty{k= 2) 200 250 300 350 400 450 500 Wavelength[nm] (b) Figure7.6.Examplecustomer... Open at page → 81 Page 81 standarduncertaintywasdeterminedbytheRSSofthecomponentsandislistedinTable7.7. Figure7.7ashowsthemeasurement uncertaintycomponents in5nmintervals. Figure7.7b showstherelativeexpandedstandarduncertainty{k= 2)at5nmintervals... Open at page → 82 Page 82 ExampleCustomerVisibleSiPhotodiode(HamamatsuS2281/S1337-1010BQ) UncertaintyComponents 1.6 1.4 I 1.0-1 108 %0.6 - i0.4 OS 0.2A 0.0 350 400 450 500 550 600 650 700 750 800 850 Wavelength|nm] 900 950 1000 1050 1100 VisWScal... Open at page → 83 Page 83 andWSarecombinedbyRSSforavalueof0.06%inthetable.Thebandpassuncertainty component isnegligible,butincludedforcomparisontotheothercustomeruncertaintytables. Uncertaintycomponentsforthetemperaturecoefficientandlong-termstab... Open at page → 84 Page 84 Table7.8.ExampleuncertaintyforcustomerInGaAsphotodiode Uncertaintycontributionfromeachcomponentofuncertainty[%] Relative Customer- IGAWS-to- IGAWS Monochro- Reproducib- combined expanded IGAWS to-monitor monitor amplifie... Open at page → 85 Page 85 ExampleCustomerInGaAsPhotodiodeUncertaintyComponents 0.0 700 800 1000 1100 1200 1300 1400 Wavelength|nml 1500 1600 1700 1800 IGAWScalibraiion »Cusiomer-lo-monilor rationoise i,IGAWS-to-monitor rationoLse XCustomer&IGAWSa... Open at page → 86 Page 86 presentedasanexamplerepresenting typicaluncertainties forthistypeofphotodiode. The uncertainty isanalyzedforeachtypeofcustomer-supplied photodiode. Table7.9.ExampleuncertaintyforcustomerTEcooledGephotodiode Uncertaintyco... Open at page → 87 Page 87 ExampleCustomerTECGePhotodiodeUncertaintyComponents 700 800 900 IJdII HIKI 1411(1 WavelengthInm) 151)1) 1600 1700 1800 *IGAWScalibration «Customcr-to-raonitor rationoise ^IGAWS-to-monitor rationoise XCustomer&IGAWSamplif... Open at page → 88 Page 88 7.4.4 FilteredDetectorExampleUncertainty(Photometer) Specialtestsoffiltereddetectors(suchasphotometers)canbemadeunderserviceIDnumber 39080S. Itshouldbenotedthattherelativeuncertaintyduetothereproducibility willincrease d... Open at page → 89 Page 89 ExampleCustomerPhotometerUncertaintyComponents 0.1 0.01 0.001 0.000] 400 425 450 475 500 525 550 575 600 625 650 675 700 725 Wavelength |nni| •VisWScalibration «Customcr-lo-monilor ralionoise iVisWS-to-monilor ralionoise... Open at page → 90 Page 90 7.5 SpatialUniformityMeasurementUncertainty TheuncertaintycomponentsfortheresponsivityspatialuniformitymeasurementofatypicalSi photodiodearelistedinTable7.11.Measurement repeatability, i.e.,short-term drift,isthe relativ... Open at page → 91 Page 91 8. QualitySystem Thespectroradiometric detectormeasurementsdescribedinthispublicationarepartoftheNIST OpticalTechnologyDivisioncalibrationservicesandareincompliancewiththeNiSTQuality SystemforMeasurementServices [8,80]ba... Open at page → 92 Page 92 1 I I I I I 1 I 1 I I I I I I I I I I I z ~UCL m -Center ;Line • _I ^LCL I I I I I I I I I I I 1 I I I I I I I II :-1992 19-Apr-1993 14-Sep-1995 6-Aug-1996 3-Oct-1996 Time[days] Figure8.1. ControlchartexampleforaNISTVisi... Open at page → 93 Page 93 K2.a(900nmto1600nm),K2.b(300nmto1000nm),andK2.c(200nmto400nm).1hcse intercomparisonsandNIST'sparticipationaredescribedinthefollowingsections. 8.2.1CCPRK2.a(NIR)900nmto1650nm TheKeyComparisonK2.awhichcoveredthespectralran... Open at page → 94 Page 94 8.2.3CCPRK2.C(UV)200nmto450nm ThethirdspectralresponsivityKeyComparison(K2.c)startedinDecember2003andcoversthe spectralregionof200nmto400nm.Thiscomparison isstillinprogressandnoresultsare availableatthetimeofthepublicati... Open at page → 95 Page 95 8.3.2 VisibleScale(350nmto1100nm) Thecurrentresponsivityscalefrom350nmto 1100nmforspectralradiantpowerattheNIST Vis/NIRSCFwasrealizedin2006.ThechangesintheVisWSassignedvaluesfromthe previousreahzation in2005areshowninFig... Open at page → 96 Page 96 8.3.3NIRScale(700nmto1800nm) TheNIRspectralradiantpowerresponsivityscale(IGAWS:700nmto1800nm)attheVis/NIR SCFwaslastrealizedin2006,exceptinthe1650nmto1800nmregionwherescaleisstill basedonthe1999realization [49].Theprevio... Open at page → 97 Page 97 9. CharacteristicsofPhotodiodesAvailablefromNIST ThissectiondescribesthecharacteristicsofthesiHconphotodiodesprovidedbyNISTunder ServiceIDnumbers3907IC,39073C,and39077C.Thephysicalandelectricalcharacteristics ofthephotod... Open at page → 98 Page 98 0.014 0.012 0.010 P- AS SAT 0.006- 0.004 t- 0.002 -0.002 I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I S1337Si(25 ° C) Si;126Si(25 ° C) \ 88 M2£ S" -s-»-®-iB-»-«w-a e-s I I I I I I I 1 1 I I I I I I... Open at page → 99 Page 99 9.2HamamatsuS2281 HamamatsuS2281siliconphotodiodesarecurrentlyprovidedbyNISTasstandardsofspectral responsivity(NISTServiceIDnumbers39073Cand39077C). Thecharacteristics are essentially identical totheS1337-1010BQ. Sinceth... Open at page → 100 Page 100 S o a. <u > 9J 1.1 1.0 0.9 0.8 0.7 0.6 1- 1 1 - ® »— - 1 . 1 •» NoBiasVolta 1 1 1 ® ge e 1— • 1 1 1 1 1 1 1 — - - 1 • VBias - • 1 1 1 1 1 1 0.0 0.2 0.4 0.6 0.8 1.0 1.2 Irradiance[mW/cm ] Figure9.3.LinearityofUDTSensorsUV... Open at page → 101 Page 101 9.4 DetectorMountingFixtureMechanicalDrawings Note:AsstatedintheIntroduction, thisdocumentfollowstheNISTpolicyof usingtheInternationalSystemofUnits(SI).Thefollowingmechanicaldrawings wereoriginallypreparedinEnglishunitsa... Open at page → 102 Page 102 Figure9.6.PhotographofasampleNISTissuedphotodiodeinmountingfixture, cap,andwoodenstoragebox. 90 Open at page → 103 Page 103 10.FutureWork Thissectionwilldiscussthefuturemodificationsandimprovements totheUVandVis/NIR SCFs.Severalpublicationsareplannedtodescribethesemodificationsandimprovements tothe SCFs.Thispublicationdescribingthemeasurement... Open at page → 104 Page 104 11.Acknowledgments Thedevelopment, operation,andevolutionofthismeasurement servicehaveinvolvedseveral NISTpersonnel.Themajorcontributorsoverthepastdecadeshavebeen:SallyBruce,Chris Cromer,BobSaunders;EdZalewski. Theauthor... Open at page → 105 Page 105 References GeneralRequirements fortheCompetenceofTestingandCalibrationLaboratories,ISO, lEC,Geneva,Switzerland(2005). F.Hengstberger, Determination oftheSpectralResponsivity ofOpticalRadiation Detectors,Bureaucentraldela... Open at page → 106 Page 106 [16] C.L.Cromer,Anewspectralresponsecalibrationmethodusingasiliconphotodiodetrap detector,Presentedatthe1991MeasurementScienceConference,Anaheim,CA(1991). [17] N.P.Fox,TrapDetectorsandTheirProperties,Metrologia28(3),197-... Open at page → 107 Page 107 [30] R.Kohler,R.Goebel,R.Pello,andJ.Bonhoure,EffectsofHumidilyandCIcaningon theSensitivityofSiPhotodiodes,Metrologia28(3),211-215(1991). ] F.L.PedrottiandL.S.Pedrotti,IntroductiontoOptics,PrenticeHall,EnglewoodCliffs, NJ... Open at page → 108 Page 108 K.D.Stock,H.Hofer,J.G.S.Romero,L.P.G.Galvan,andW.Schmid,Cryogenic radiometerfacilityoftheCENAMandfirstinternationalcomparison,Metrologia37(4), 269-271(2000). T.C.Larason,S.S.Bruce,andA.C.Parr,Spectroradiometric detectorm... Open at page → 109 Page 109 C.L.Wyatt,RadiometricCalibration:TheoryandMethods,AcademicPress,NewYork, NY(1978). J.L.Gardner,UncertaintyEstimatesinRadiometry,Ch.6inOpticalRadiometry,A.C. Parr,R.U.Datla,andJ.L.Gardner,eds.,ElsevierAcademicPress,Amster... Open at page → 110 Page 110 J.L.GardnerandF.J.Wilkinson,Response-Time andLinearityofInversionLayer SiliconPhotodiodes,AppliedOptics24(10),1531-1534(1985). A.L.MigdallandC.Winnewisser,LinearityofaSiliconPhotodiode at30MhzandIts EffectonHeterodyneMea... Open at page → 111 Page 111 p.Kuschnerus, H.Rabus,M.Richter, F.Scholze, L.Werner,andG.Ulm, Characterization ofphotodiodesastransferdetectorstandardsinthe120nmto600nm spectralrange,Metrologia35(4),355-362(1998). R.Gupta,K.R.Lykke,P.S.Shaw,andJ.L.Deh... Open at page → 113 Page 113 AppendixA: SampleCalibrationReport UlUrrEOSTATESDEPARTMENTOFCOMMERCE NationalInstituteofStandardsandTechnology for namamatsuStJiconPhotodiodeModelS2281,S/NUMU Issuedto: Big-timeLaborator)' Atm.:Dr.AiyssaScientist 100Labo... Open at page → 114 Page 114 REPORTOF(AIJBRATION NISI'Test439073C-SpectralRespDn*.i\-ity Big-timeLaboratory Manufacturer:Ilamamatsw Model#:S2281 Serial#;HMM Tlifspatialuniformityoftheresponsixityacrossthetestphotodiodephtnosensitivc areawas measured... Open at page → 115 Page 115 REPORTOFCAIJBRATiON NISITest#39073C -SpectralRespoiisivity JBig-UmeLaboratory Manufacturer:Hamaniatsu Model^:S2281 Serial lititit; IaWeI Spectralpower lesponsivifyofMamaniatKusiliconpiiotodiodemoilelS2281.S/NH### Spectra... Open at page → 116 Page 116 REPORTOFC"ALIBRATION Maiiuiljccurer:Hamamami NISrlest#39073C -SpectralResponsivity Model#:S228} Big-tjmeLaboratory Serial.#rH### Tsible1(coHt.) Spectralpom'i-responsivityofIIt<inamiitsusiliconpliotodiodcmodelS2281,S/NH##... Open at page → 117 Page 117 REPORTOFC-AIJBRATION Manufacturer:Hamainatsu NISTTest tt39073C-SpectralResponsivify M.nk) S228 1. Biy-timeLaburatory Scn.il - Htiftfi y|nim 1.010 005 1.000 0090 X[nun] RelativeRcspoash'iiy Figure2b.SiirfitcepkiEul'dsei^'... Open at page → 118 Page 118 REPORTOFCALIBRATION Mainilacutrer:Hamamats.ii HISTTest#39073C •SpectralResponsmty Model#:S228 1 Big-timeLaboratoty Serial Tabic2 Spectralpawei-fespoiislvity ijiiffrtaiiitybutlgetsummaryforHamautatsuMioclelS2281,S/NH### i... Open at page → 119 Page 119 REPORTOFCAIJBRATION NISITestP39073C -SpectralResponsivity Big-timcLaboratory 4.GeneralIntbrmatioii Manufacturer:Hamamatsu Model#:S228I Scnal fi:imn TUeuncertaintyofthespecira!radiantpowerresptuisivitywillbehiraerthanrepo... Open at page → 120 Page 120 REPORTOFCALIBRATION NISrTestf?39073C -SpectralResponsivity Big-timeLaboraton' Mamifacmrer:Hams»matsu M.odeT#:S2281 Serial#:H##f? AppewtHx: <>PERATt>SGINSTRlCTIONSFORNIST{>HOIOIMOOE TiieNISTcharacteiizec!phoU>diode coa.si... Open at page → 121 Page 121 AppendixB: Bibliography Optics E.Hecht,Optics,2ndedition,Addison-WesleyPublishingCompany, 1987. F.L.PedrottiandL.S.Pedrotti,Introduction toOptics,2ndedition.PrenticeHall,Englewood Cliffs,NJ,1993. F.A.JenkinsandH.E.White,... Open at page → 122 Page 122 T.M.Frederiksen,IntuitiveOperationalAmplifiers,McGraw-Hill,NewYork,NY,1988. J.G.Graeme,PhotodiodeAmplifiers:OpAmpSolutions,McGraw-Hill,NewYork,NY,1996. D.L.Terrell,OpAmps:Design,Application,andTroubleshooting, Butterwort... Open at page → 123 Page 123 NewDevelopmentsandApplications inOpticalRadiometry III,Metrologia28(3)1991 . NewDevelopmentsandApplications inOpticalRadiometryIV,Metrologia30(4)1993. NewDevelopmentsandApplicationsinOpticalRadiometryV,Metrologia32(6)199... Open at page →