Dimensional Measurement of Nanostructures with SEM

1 Page 1 NIST Special Publication 250-96 Dimensional measurement of nanostructures with scanning electron microscopy K. A. Bertness This publication is available free of charge from: https://doi.org/10.6028/NIST.SP.250-96 Open at page → 2 Page 2 NIST Special Publication 250-96 Dimensional measurement of nanostructures with scanning electron microscopy K. A. Bertness Applied Physics Division Physical Measurement Laboratory This publication is available free of ch... Open at page → 3 Page 3 Certain commercial entities, equipment, or materials may be identified in this document in order to describe an experimental procedure or concept adequately. Such identification is not intended to imply recommendation or... Open at page → 4 Page 4 i This publication is available free of charge from: https://doi.org /10.6028/NIST.SP. 250 - 96 Abstract Scanning electron microscopy (SEM) is widely used for the measurement of dimensions of nanostructures. This documen... Open at page → 5 Page 5 1 This publication is available free of charge from: https://doi.org /10.6028/NIST.SP. 250 - 96 Introduction Scanning electron microscopy (SEM) is widely used for the measurement of dimensions of nanostructures. This doc... Open at page → 6 Page 6 2 This publication is available free of charge from: https://doi.org /10.6028/NIST.SP. 250 - 96 measurements will be taken for the y-direction on features 2C and 4C, using the numerical row and column labels at the corne... Open at page → 7 Page 7 3 This publication is available free of charge from: https://doi.org /10.6028/NIST.SP. 250 - 96 programs include an ability to enter the nominal conversion factor P nom from pixels to length independently for horizontal... Open at page → 8 Page 8 4 This publication is available free of charge from: https://doi.org /10.6028/NIST.SP. 250 - 96 = σn,y / ny , for n = n x = ny, and the data in Fig. 1 support this assumption. In principle, when features with different p... Open at page → 9 Page 9 5 This publication is available free of charge from: https://doi.org /10.6028/NIST.SP. 250 - 96 Applying the rule that relative uncertainties of independent multiplicative factors add in quadrature [3] and using the fact... Open at page → 10 Page 10 6 This publication is available free of charge from: https://doi.org /10.6028/NIST.SP. 250 - 96 σθ as at most the difference between the two means for the two sets normalized to the mean, 0.0025. An example of an uncerta... Open at page → 11 Page 11 7 This publication is available free of charge from: https://doi.org /10.6028/NIST.SP. 250 - 96 Application to specimens with unknown dimensions The nanostructures specimens to be measured are mounted in the SEM and imag... Open at page → 12 Page 12 8 This publication is available free of charge from: https://doi.org /10.6028/NIST.SP. 250 - 96 the x direction. A similar equation can be written for σ Ly, and the combined uncertainty in L cal becomes (again assuming n... Open at page → 13 Page 13 9 This publication is available free of charge from: https://doi.org /10.6028/NIST.SP. 250 - 96 cos 4 (60.2 °) = 0.061 and sin 4 (60.2 °) = 0.567 to yield an estimated pixel count relative uncertainty of 0.16%. The mean... Open at page → 14 Page 14 10 This publication is available free of charge from: https://doi.org /10.6028/NIST.SP. 250 - 96 Source Standard relative uncertainty (type) (%) Correction factor: σCx /Cx 2.5 (B) Correction factor: σCy /Cy 2.5 (B) Pixel... Open at page → 15 Page 15 11 This publication is available free of charge from: https://doi.org /10.6028/NIST.SP. 250 - 96 Fig. 4. Illustration of height measurement for tilt angle 20° using P cal of 29.6 nm/pixel and 29.7 nm/pixel, respectively,... Open at page → 16 Page 16 12 This publication is available free of charge from: https://doi.org /10.6028/NIST.SP. 250 - 96 artifact. For typical lateral measurements, the systematic error in the feature size of the calibration artifact is the maj... Open at page → 17 Page 17 13 This publication is available free of charge from: https://doi.org /10.6028/NIST.SP. 250 - 96 Scanning Electron Microscope (SEM) Calibration Report NIST, 325 Broadway, Boulder, CO 80305 Instrument Name* and Location:... Open at page → 18 Page 18 14 This publication is available free of charge from: https://doi.org /10.6028/NIST.SP. 250 - 96 Calibration Data Image names: RM_1C_Img_001, RM_1C_Img_002, RM_3C_Img_001, RM_3C_Img_002 Dimension: X Magnification: 30,000... Open at page → 19 Page 19 15 This publication is available free of charge from: https://doi.org /10.6028/NIST.SP. 250 - 96 Calibration Data Image names: RM_2C_Img_001, RM_2C_Img_002, RM_4C_Img_001, RM_4C_Img_002 Dimension: Y Magnification: 30,000... Open at page → 20 Page 20 16 This publication is available free of charge from: https://doi.org /10.6028/NIST.SP. 250 - 96 Calibration Data Image names: RM_1Gt20_Img_001, RM_1Gt20_Img_002, RM_3Gt20_Img_001, RM_3Gt20_Img_002 Dimension: X θ Magnifi... Open at page → 21 Page 21 17 This publication is available free of charge from: https://doi.org /10.6028/NIST.SP. 250 - 96 Calibration Data Image names: RM_2Gt20_Img_001, RM_2Gt20_Img_002, RM_4Gt20_Img_001, RM_4Gt20_Img_002 Dimension: Y θ Magnifi... Open at page → 22 Page 22 18 This publication is available free of charge from: https://doi.org /10.6028/NIST.SP. 250 - 96 Separation of Yθ Correction Factor Data into Sets for Each Setting of Tilt Angle Set 1: RM_2Gt20_Img_001, RM_4Gt20_Img_001... Open at page →