Standards Index · NIST

NIST SP 250-96 (2017)

Dimensional Measurement of Nanostructures with Scanning Electron Microscopy

OFFICIAL SOURCE ↗ FIND MENTIONS IN THE ATLAS

Status: Current
Publisher: NIST
Year: 2017
Discipline: Dimensional

What it covers

NIST Measurement Services documentation: SEM nanostructure dimensional metrology. Public domain; the full text is readable in the Atlas document library.

Summary written for this index — consult the official text for normative requirements.

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